Apparatus for drying a substrate and method for performing the same using thereof
2010
PURPOSE: A substrate drying device and a substrate drying method using the same are provided to prevent a temperature drop by blocking cleaning solutions which reversely flows along the circumference of a substrate. CONSTITUTION: A housing(10) is surrounded by a first barrier with a first height. A rotation support unit(20) rotates a substrate in the housing. A nozzle(30) is arranged on the upper side of the rotation support unit to provide fluid to the substrate. A cleaning solution supply unit(50) supplies cleaning solutions for cleaning the substrate to the nozzle. A dry solution supply unit(60) supplies dry solutions for drying the substrate to the nozzle.
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