A Study on the Effect of the Sensor Gain Error in the Precision Measurement of Straightness Error Using Mixed Sequential Two-Probe Method

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn’t give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge’s form error owing to close relationship between straightness error and angular motion error of the table in the error terms.