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Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit
Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit
2012
Serrels
Farrell
Lundquist
Reid
Vedagarbha
Keywords:
Nonlinear system
Integrated circuit
Optoelectronics
Microscopy
Solid immersion lens
Silicon
variation
Materials science
Correction
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