Manufacturing method for vertical strip conductor, memory device and manufacturing method thereof
2005
The present invention relates to a method for manufacturing a vertical strip conductor, a storage device and an associated production method, wherein after forming a contact region (S, D) in a carrier substrate (1) a catalyst (8) in the contact region (S, D) was prepared and is then formed between the catalyst (8) and the contact region a free-standing electrically conductive nano-element (9) and embedded in a dielectric layer.
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