Temperature sensing and heating device

Provided is a method to control the temperature of a large substrate to be heated. A temperature sensing means 20 is arranged laterally to an area where a Strahlungsaufheizeinrichtung 14 12 faces a substrate to be heated within a heating chamber. 6 A heating device 2, the heating chamber 6, the Strahlungsaufheizeinrichtung 14, a power supply device 25, a substrate holder 11, a controller 15 and a temperature sensing means 20. A control program is installed in the controller 15, according to which the power supply means 25, the power which the Strahlungsaufheizeinrichtung 14 is applied, controls to generate heat so that the temperature of the temperature measurement substrate 22, which is detected by a thermocouple 21, the temperature sensing means 20 is at a set temperature. In addition, a circulation duct 23 is disposed in close contact with the temperature sensing means 20, and with a coolant flowing through the circulation channel 23, the temperature of the temperature measurement substrate 22 on the set temperature to an exit temperature can be cooled.