A trench-isolated micro-mirror and the torsion of the mirror manufacturing method

The invention discloses a micro torsion mirror with a trench-isolated mirror surface and manufacturing method thereof, and belongs to the field of micro-opto-electric mechanical systems (MOEMS). The mirror surface of the micro torsion mirror consists of a conductive mirror surface 1 isolated by a trench and an isolating mirror surface 2; the trench is filled with a sandwiched material with carbon dioxide 4 at two sides and polycrystalline silicon 3 in the middle. When the micro torsion mirror is in work, after an energized lead anchor 7 is energized, the conductive mirror surface 1 and the movable comb teeth 8 on the conductive mirror surface 1 are energized to drive the comb teeth to drive the whole mirror surface to rotate under the action of electrostatic force; due to the existence of the trench, the isolating mirror surface 2 is nonconductive; therefore, an accurate capacitance value caused by the rotation of the mirror surface can be obtained by detecting the comb teeth in an uncharged manner. The whole apparatus has the advantages of simple structure, novel design method and obvious effect, and can effectively measure the capacitance between the movable comb teeth and the fixed comb teeth and well realize the closed-loop control of the system, therefore, the reliability and accuracy of the performance of the micro torsion mirror can be guaranteed; the micro torsion mirror has wider market prospect.