Typical properties and research progress of Al-doped-ZnO

The Al-doped-ZnO(ZAO) is a kind of complex oxide semiconductor with wide application prospect and development potentiality.The typical properties,such as transparent conductivity,photoluminescence and infrared reflection,were introduced.Several synthesis processes,such as sol-gel method,hydrothermal method,refluxing method and co-precipitation method,were discussed.The preparation processes of ZAO were expounded.The preparation technologies,namely sol-gel method,metal chemical vapor deposition,magnetron sputtering,pulsed laser deposition and thermal spray of ZAO films were analyzed.Finally,the directions of research and development were described.