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Three Dimensional Local Electrode Atom Probe Analysis of Microtips Fabricated on a Planar Specimen Utilizing a Broad Ion Beam
Three Dimensional Local Electrode Atom Probe Analysis of Microtips Fabricated on a Planar Specimen Utilizing a Broad Ion Beam
2005
R W ONeill
Thomas F. Kelly
R M Martens
David J. Larson
Scott Albert Wiener
Robert M. Ulfig
M. Ali
David A. Reinhard
Keywords:
Analytical chemistry
Atom probe
Ion beam
Electrode
Materials science
Planar
Atomic physics
Correction
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