Studies of optical and crystal properties of ALD grown ZnO

David Elam,Anastasiia Nemashkalo,Yuri M. Strzhemechny,Chonglin Chen,Arturo A. Ayon,Andrey A. Chabanov

Studies of optical and crystal properties of ALD grown ZnO

2011

David Elam
Anastasiia Nemashkalo
Yuri M. Strzhemechny
Chonglin Chen
Arturo A. Ayon
Andrey A. Chabanov

In this paper, we report structural and photoluminescence properties of ZnO thin films grown on single crystal ZnO substrates by means of Atomic Layer Deposition (ALD).

Keywords:

Thin film
Single crystal
Doping
Photoluminescence
Wide-bandgap semiconductor
Materials science
X-ray crystallography
Atomic layer deposition
Optoelectronics
Crystal structure

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