Hot filament and heat evaporation vapor deposition membrane equipment

The invention discloses a hot filament and thermal evaporation vapor deposition thin film device for material preparation. The device consists of a hot filament chemical vapor deposition activation part for activating a source gas to deposit the material and forms a combination with a thermal evaporation part. A substrate bracket does combined movement relative to the hot filament or the thermal evaporation wire or the hot filament and the thermal evaporation wire.