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Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope
Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope
2017
Evgeny V. Sysoev
Yuri V. Chugui
Rodion V. Kulikov
Ignat A. Vykhristyuk
Liang-Chia Chen
Hoang Hong Hai
Kuang-Chao Fan
Keywords:
Interference (wave propagation)
Engineering
Microscope
Interferometry
Optics
Edge detection
lateral resolution
Correction
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