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RF-MEMS Switch Module in a 0.25 µm SiGe:C BiCMOS Process
RF-MEMS Switch Module in a 0.25 µm SiGe:C BiCMOS Process
2014
Mehmet Kaynak
Keywords:
BiCMOS
Microelectromechanical systems
Electrical engineering
Electronic engineering
Engineering
bicmos process
Correction
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