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Quantitative Strain Measurement in Semiconductor Devices by Scanning Moiré Fringe Imaging
Quantitative Strain Measurement in Semiconductor Devices by Scanning Moiré Fringe Imaging
2014
Suhyun Kim
Sungho Lee
Younheum Jung
Joong Jung Kim
Gwangseon Byun
Sun Young Lee
Heabum Lee
Keywords:
Moiré pattern
Semiconductor device
Analytical chemistry
Materials science
Strain (chemistry)
strain measurement
Metallurgy
Optoelectronics
Correction
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