Mems manufacturing testing: an accelerometer case study

Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering characterization, and reliability evaluations. MEMS testing has had limited visibility in literature from companies that have successfully industrialized applications such as pressure sensors and accelerometers. This limited visibility is not an indication of the importance of this topic that represents a significant portion of the overall cost, rather it is more likely and indication custom nature of test for MEMS. This paper presents a case study that addresses the issues associated with MEMS testing of accelerometer devices and an effective solution based on a system approach.