Investigation and performance evaluation of a d14 ceramic actuator

Abstract A new wedge-type of ceramic actuator using d14 is developed. Ceramic d14 is rarely seen and addressed in research articles. Compared to the shear formation of the ceramic actuator d15 , the proposed d14 actuator has an advantage of its nearly square and thinner dimensions. Driven by sinusoidal signal, asymmetric Lissajous motion trajectory is gained. Associated with appropriate mechanism, effective transverse displacement is obtained to propel a linear motion stage for instance. Analytical simulation in ANSYS and experiment are carried out to investigate the resonance frequency and vibration mode shape as well as amplitude. Results of both approaches are in close approximation. The feature of the d14 ceramic actuator designed in this study is able to provide large force and medium speed.