Potential application of graphene nanomechanical resonator as pressure sensor

Abstract A pressure sensor consisting of graphene nanomechanical resonator and Si/SiO 2 pressure membrane is demonstrated. The resonance frequency of resonator as function of external pressure smaller than 100 kPa is simulated to be linear using the finite element method. The obtained pressure sensitivity for a single-layer graphene resonator can reach 26,838 Hz/kPa, bigger than that of conventional resonant pressure sensors by two orders of magnitude. Moreover, the sensitivity can be further improved by increasing the ratio of side length to thickness of pressure membrane, and reducing the thickness and built-in strain of the resonator.