Silicon-Micromachined Separation Columns Coated with Amino Acid Films for an Integrated On-Chip Gas Chromatograph

A small column (micro-column) has been fabricated on-chip that can contribute to development of a miniature gas Chromatograph for mobile and multi-point atmospheric monitoring. The micro-column, which was formed on silicon substrate, was 100 μm wide, 10 μm deep, and 2 m long. The stationary phase of this column was made of a plasma-amino-acid film for enhanced chromatographic performance. This plasma-polymer film is highly interactive with some gases and highly resistive some acids which were used micromachining. The micro-column was attached to other parts by means of a silica tube. The silica tube was a joint square-pyramidal hole that was dug using a unique ultrasonic machining technique (micro-ultrasonic machining). This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.