Measurement of electron energy distribution in an asymmetric capacitively coupled plasmas

Summary form only given, as follows. In a low-pressure capacitive coupled Argon RF Discharge at 13.56 MHz, the electron energy distribution function (EEDF) was measured with RF compensated probe. Measurements have been made in Argon ranging in gas pressure from 1 mTorr to 50 mTorr and in a power of 1.2 kW. Measurements also show the differences between RF compensated probe and uncompensated probe. With increasing gas pressure a transition from low temperature mode to high temperature mode was found.