Phase Transition Induced on Ag/TiO2 Thin Films by Transmitted Electron Beam

Ag/TiO2 thin films have been deposited by sol-gel process in glass substrates. The films were characterized by X-ray diffraction (XRD), electron diffraction and high-resolution transmission electron microscopy (HRTEM). Only anatase phase was identified by XRD but electron diffraction shows the presence of anatase and rutile phases. Changes in diffraction pattern were visually observed during the HRTEM measurement, showing the sensitivity of these samples to the electron beam.