Formation of YBa/sub 2/Cu/sub 3/O/sub 7/ superconducting films by ion implantation

We have fabricated superconducting thin films by ion implanting Y into a base material formed by the coevaporation of BaF/sub 2/ and Cu. The implantations were carried out at 77 K and resulted in the formation of an amorphous Y-Ba-Cu-F surface layer. Oxygen annealing with the addition of water vapor renders the base material insulating with a room-temperature resistance of 10/sup 5/ ..cap omega... An identical annealing treatment on the Y-implanted material produces a superconductor with an onset temperature of 85 K.