Ferroelectric properties of (Pb,La)(Zr,Ti)O3 capacitors employing Al-doped ZnO top electrodes prepared by pulsed laser deposition under different oxygen pressures

Al-doped ZnO (AZO) top electrodes were deposited under oxygen pressures from 0.02 to 20 Pa using pulsed laser deposition (PLD) to fabricate ferroelectric (Pb,La)(Zr,Ti)O3 capacitors. The oxygen pressure during PLD affected the surface morphology of the AZO top electrodes as well as the ferroelectric properties. In particular, the surface morphologies were dramatically altered by increasing oxygen pressure. We obtained desirable ferroelectric properties with the highest maximum polarization and lowest coercive voltage at around 2.0 Pa. The saturation characteristics, hydrogen degradation resistance, and fatigue resistance were almost unrelated to the oxygen pressure during PLD.