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INTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS
INTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS
2008
Julio Costa
Tony Ivanov
Jonathan Hale Hammond
Joseph M. Gering
Elizabeth Glass
J. Reed
S. Crist
T. Mercier
S. Kim
J. Jorgenson
P. Gorisse
David C. Dening
D. Kerr
Keywords:
Optoelectronics
Silicon on insulator
Microelectromechanical systems
CMOS
Materials science
soi cmos
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