Development of a 200 kV FIB system for non destructive three-dimensional near surface analysis

Abstract A non-destructive three-dimensional near-surface analysis (Rutherford backscattering and medium energy ion scattering) system with a compact 200 kV focused ion beam (FIB) column has been constructed and is under evaluation now. The focusing performance of this column is confirmed by a secondary electron image obtained by scanning the microprobe over a sample. A minimum beam spot size of less than 80 nm with a current of 30 pA is obtained by a 400 keV Be 2+ ion beam. A high-vacuum sample chamber with a six-axis goniometer and an electrostatic toroidal analyzer for channeling and RBS analyses is connected to the acceleration column. The three-dimensional analysis by using toroidal electrostatic analyzer is under investigation.