A method and apparatus for resource recycling waste etching the silicon core

2016 
The present invention discloses a method and apparatus for resource recovery etching using the silicon core waste, waste processing belonging to the field of etching polycrystalline silicon core industry; method of the invention is in a static mixing reactor, adding nitric acid in the waste salt and / or sulphate, a mixture into the settling tank by natural settling period, the supernatant was nitric acid solution, the precipitate contains small amounts of metal ions through the filter press, the filter cake product of fluorosilicate, and the filtrate serum performed using high concentrations of nitric acid distillation column distillation products, the column reactor to obtain a solution containing metal ions most loop configuration for a mixed solution of nitrate and sulphate, a small part into subsequent processing apparatus. The resulting concentration of nitric acid according to the present invention is greater than 60% recovery of between 85% to 95%, the recovery of high purity fluorosilicate, silicon cores while achieving recovery of nitric acid etching waste liquid and fluorine to reduce the subsequent processing of the wastewater treatment system pressure, no secondary pollution.
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