Controlled Synthesis and Device Applications of Carbon Nanowalls Grown by Plasma-enhanced Chemical Vapor Deposition

Morphology and crystallinity control of carbon nanowalls were investigated in this study. Precise measurements and controls of radicals and ions in the plasma make the controlled syntheses of carbon nanowalls (CNWs) possible. For example, with increasing the O₂ partial pressure adding to the growth ambient, the CNWs densities decrease, and their crystallinity increases. On the other hand, the density of Pt nanoparticles supported on the CNWs by scCO2 can be developed by control of CNW’s crystallinity. These results obtained in this study suggest that the CNWs are promising as new functional device materials in various applications.