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Acemap > Paper > Sub 100nm SOI MOSFETの横方向不純物拡散制御の重要性とプロセス指針に関する研究 (産学連携への掛け橋)

Sub 100nm SOI MOSFETの横方向不純物拡散制御の重要性とプロセス指針に関する研究 (産学連携への掛け橋)

2002 
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