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Materials modifications using multi-ion processing and lithography system
Materials modifications using multi-ion processing and lithography system
2012
B. R. Appleton
Sefaattin Tongay
Max Lemaitre
B. P. Gila
Joel Fridmann
Paul Mazarov
Jason E. Sanabia
S. Bauerdick
L. Bruchhaus
Ryo Mimura
Ralf Jede
Keywords:
Lithography
Ion
Analytical chemistry
Materials science
Nanotechnology
Correction
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