Theoretical and empirical distributions for ion implantation profiles in InP

Abstract For light mass projectile implantations of InP that are highly dominated by electronic stopping, the standard Gaussian approximation provides a poor fit to the observed experimental profile. Using four moments based on theoretical considerations we have constructed profiles using a terminated Edgeworth and Pearson I distribution. It is found that Edgeworth and Pearson I distributions constructed with four moments derived from theoretical values are not significant improvements over the standard LSS Gaussian. The moments of the experimental profiles have therefore been empirically determined. These moments together with the Person IV distribution are shown to fit experimental profiles over at least two orders of magnitude.