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A new substrate engineering for the formation of Empty Space in Silicon (ESS) induced by silicon surface migration
A new substrate engineering for the formation of Empty Space in Silicon (ESS) induced by silicon surface migration
2001
Tsutomu Sato
Ichiro Mizushima
Yoshitaka Tsunashima
Keywords:
Electronic engineering
Substrate (chemistry)
Silicon on insulator
Computer science
Silicon
hydrogen annealing
Correction
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