Design characteristics of molecular drag pumps

2001 
This paper represents a model of a drag pump, to be employed as a part in modern turbo-molecular pumps. The important function of these pumps is their efficient working in the range of medium and high vacuum. The design characteristics of a molecular drag pump, such as, ultimate vacuum, pumping speed, compression ratios, and the efficiency have been experimentally determined. A close proximity has been found between the theoretically computed values and the experimental evaluation. At the end, some applications of these pumps in various industrial and technological areas have been highlighted.
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