DNA detection with top-down fabricated silicon nanowire transistor arrays in linear operation regime

This work was done in framework of the project "Nanodrahtsensoren als markerfreie, voll-elektronische Immunosensoren," funded by the BMBF under contract number 17042X11. T. C. N. gratefully acknowledges the financial support by the DAAD. Furthermore, we would like to thank the group of Prof. A. Offenhausser, Peter Grunberg Institute 8, Research Center Julich, Germany, for the fabrication of the SiNW FETs in a former project of our group.