Growth and Dielectric Properties of Ferroelectric BaTiO3 Thin Films for Cantilever-Type Microsensors

ABSTRACT Ferroelectric BaTiO3 (BTO) thin films were deposited on Si, silicon-on-insulator (SOI) and MgO substrates by pulsed laser deposition. The orientations of the films, polycrystalline and epitaxial phase, were controlled by the lattice mismatch between the BTO film and substrates. The structural properties and surface morphologies were examined using X-ray diffractometer and atomic force microscope. The dielectric properties of BTO films were investigated using metal-ferroelectric-metal (MFM) and interdigital co-planar capacitors. Conductive oxide layers, SrRuO3(SRO) and La0.5Sr0.5CoO3 (LSCO), were grown on Si and SOI substrates as bottom electrodes. For MFM capacitors based on Au/BTO/SRO/Si and Au/BTO/LSCO/SOI layer structures, a little asymmetric capacitance-voltage curves were obtained with about 36% capacitance tunability. The remanent polarizations were about 21 μC/cm2 and the coercive fields were about 71 kV/cm. For an interdigital capacitor based on Au/BTO/MgO layer structure, a little lossy ...