On-Wafer Metrology for a Transmission Line Integrated Terahertz Source

Kassiopeia Smith,Bryan Bosworth,N. R. Jungwirth,Jerome Cheron,Nathan D. Orloff,Christian J. Long,Dylan F. Williams,Richard A. Chamberlin,Franklyn Quinlan,Tara M. Fortier,Ari Feldman

On-Wafer Metrology for a Transmission Line Integrated Terahertz Source

2020

Kassiopeia Smith
Bryan Bosworth
N. R. Jungwirth
Jerome Cheron
Nathan D. Orloff
Christian J. Long
Dylan F. Williams
Richard A. Chamberlin
Franklyn Quinlan
Tara M. Fortier
Ari Feldman

We developed a measurement system that combines on-wafer metrology and high-frequency network analysis to characterize the response of transmission-line integrated Er-GaAs and InGaAs photomixers up to 1 THz to support the telecommunication and electronics industry.

Keywords:

Electronics
Phase noise
Terahertz radiation
Transmission line
Metrology
Materials science
Wafer
Optoelectronics
Fiber laser
Electron-beam lithography

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