Catadioptric projection objective lens based on high numerical aperture

The invention discloses a catadioptric projection objective lens based on a high numerical aperture and aims to realize imaging of a pattern on a mask onto an image plane. The catadioptric projection objective lens comprises a first lens set, a second lens set and a third lens set, wherein the first lens set, the second lens set and the third lens set are coaxially arranged, the first lens set has positive focal power, the second lens set and the third lens set have negative focal power, the first lens set comprises at least one pair of opposite concave reflective surfaces, and at least two negative meniscus lenses are arranged between the opposite concave reflective surfaces. According to the catadioptric projection objective lens, the at least two negative meniscus lenses are arranged between the opposite concave reflective surfaces of the first lens set, field curvature and chromatic aberration generated during primary imaging can be effectively corrected by utilizing the negative focal power generated by the negative meniscus lenses to compensate the positive focal power generated by the concave reflective surfaces, the excellent constraint effect on a light incidence angle of the second lens set is realized, the largest caliber of the lenses is reduced, the aspheric quantity is reduced, and making and processing cost of optical systems and detection difficulty of optical elements are reduced.