Terahertz Microscopy in Silicon Technology

This paper presents a terahertz microscope offering sub-wavelength resolution for imaging applications. The chip consists of a coupled terahertz Colpitts oscillators operating at 550GHz. It is implemented in a standard CMOS 65nm technology. A near-field sensing region between the oscillators is sensitive to external perturbation and results in a shift of the operating frequency. The far-field radiating frequency is extracted by an on-chip antenna and measured with an external harmonic mixer. The spatial resolution is verified with a micro-positioning stage.