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High resolution templates for step and flash imprint lithography
High resolution templates for step and flash imprint lithography
2002
Douglas J. Resnick
William J. Dauksher
David P. Mancini
Kevin J. Nordquist
Eric S. Ainley
Kathleen A. Gehoski
Jeffrey H. Baker
T. C. Bailey
Byung Jin Choi
Stephen C. Johnson
Sidlgata V Sreenivasan
John G. Ekerdt
Carlton G Willson
Keywords:
Nanotechnology
Lithography
Template
Materials science
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