An In-Process X-Ray Measuring System with a Heat-Resistant Filter Transmitting Soft X-Rays for Light Elements

We constructed a RHEED-Si (Li) SSD measuring system which has the capability to detect, in-process, characteristic X-rays emitted from light elements such as oxygen. The feature of the system is that the X-ray detecting system uses a heat-resistant filter made of an Al film and a BN film in front of the SSD. The filter transmits soft X-rays and blocks light and heat radiation which emanate from processes and influence the SSD performance. It was demonstrated that the measuring system could detect change in the O-Kα X-ray intensity from a SiO2/Si(100) sample when it was heated to and kept at 500°C.