Silicon micro machined hermetic packaging technology for optical subassemblies
2006
A novel technology for building hermetic optical subassemblies based on silicon is presented which supports precision alignment features, integration of passives, outstanding RF-performance and waferscale assembly and testing. Examples of OSAs will be shown.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
3
Citations
NaN
KQI