Humidity sensing properties of spray deposited Fe doped TiO 2 thin film

In the present work, ferrite (Fe) doped TiO2 thin films with different volume percentage (vol%) were synthesized using a spray pyrolysis technique. The effect of Fe doping on structural properties such as crystallite size, texture coefficient, microstrain, dislocation densities etc. were evaluated from the X ray diffratometry (XRD) data. XRD data revealed that the synthesis samples showed a polycrystalline anatase TiO2 phase for sample synthesis up to 2 vol% and mixed anatase and rutile crystalline phase was observed for sample synthesis at 4 vol% Fe doped TiO2. The crystalline size observed to decrease with increases in Fe dopant vol% and also other structural parameters changes with Fe dopant percentage. In the present work, electrical resistance was observed to decrease with a rise in Fe dopant vol% and rise in temperature of the sample. Thermal properties like temperature coefficient of resistance and activation energy also shows strong correlation with Fe dopant vol%. Humidity sensing properties of the synthesis sample alter with a change in Fe dopant vol%. In the present paper, we report maximum sensitivity for the sample synthesis for 2 vol% Fe doped TiO2, which is 88.7%, and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.