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Structural Change of Silicon Carbide Surface Etched by Chlorine-Trifluoride
Structural Change of Silicon Carbide Surface Etched by Chlorine-Trifluoride
2013
Hori Ryota
Hatayama Tomoaki
Yano Hiroshi
Fuyuki Takashi
Keywords:
Structural change
Silicon carbide
Chlorine trifluoride
Materials science
Inorganic chemistry
Metallurgy
Etching
Trench
Correction
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