Plasma generating apparatus, the plasma generating method and an ozone generating method for suppressing

The present invention, while increasing the generation amount of activated species, aims at suppressing the generation of ozone, a pair of electrodes 21 and 22 provided the dielectric film 21a, and 22a on at least one of the opposing surfaces, wherein and a pulse voltage is applied between the electrodes 21 and 22 the voltage applying means 4 for plasma discharge, the corresponding configured to penetrate the whole respectively provided at locations fluid flow holes 21b of the electrodes 21, 22, and 22b comprising a fluid circulation hole 21b, in the plasma generator 100 which touch the plasma ions or radicals adapted to generate as it passes through 22b is fluid, the voltage applying means 4, the electrode 21, peak value or pulse width of the pulse voltage applied between the 22 or varying both.