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Development of ZnO Thin Film Sensor Array for Minute Pressure Measurement
Development of ZnO Thin Film Sensor Array for Minute Pressure Measurement
2018
Kota Kawai
Yuhki Toku
Yasuyuki Morita
Yang Ju
Keywords:
Pressure measurement
Thin film
Optoelectronics
Sensor array
Materials science
thin film sensor
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