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Deposition of Tantalum Oxide Films by UV Laser Reactive Ablation in O3 Ambient
Deposition of Tantalum Oxide Films by UV Laser Reactive Ablation in O3 Ambient
2016
Koji Yamagishi
Yasuo Tarui
Keiichi Miyairi
Keywords:
Deposition (law)
Laser
Tantalum oxide
Ablation
Photochemistry
Materials science
uv laser
Correction
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