Wafer pick-up device
1975
PURPOSE: To make possible the simultaneous pick-up of a multiplicity of wafers by disposing a pick-up device having plural pick-up recesses built-in with a multiplicity of vacuum suction holes over a a multiplicity of the wafers placed in predetermined positions in opposition thereto. COPYRIGHT: (C)1977,JPO&Japio
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI