An operating method with lateral scan for reducing the error in topography caused by the tip-sample angle in atomic force microscopy.

: The atomic force microscopes (AFM) images are obtained by keeping the bending of the cantilever unchanged in contact mode. However, it is found that changes in the tip-sample angle during parallel scan result in error in the topographic image. It is also discovered that measurement results obtained in the blind scan region contained large errors. In contrast, regions opposite the blind scan region gave more reliable result. To eliminate this topographic error caused by change in the tip-sample angle, a new operating method with lateral scan is utilized in AFM. Comparative experiments have been performed, and the results show that the error could be eliminated or decreased by using the operating method.