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On Shallow Trench Isolation for Deep Submission CMOS Technologies
On Shallow Trench Isolation for Deep Submission CMOS Technologies
1998
Amitava Chatterjee
Mahalingam Nandakumar
Stan Ashburn
Vikas Gupta
Siang P. Kwok
Ih-Chin Chen
Keywords:
Shallow trench isolation
CMOS
Geology
Electronic engineering
Engineering physics
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