Study of the dose rate effect of 180 nm nMOSFETs

Radiation induced offstate leakage in the shallow trench isolation regions of SIMC 0.18 μm nMOSFETs is studied as a function of dose rate. A "true" dose rate effect(TDRE) is observed. Increased damage is observed at low dose rate(LDR) than at high dose rate(HDR) when annealing is taken into account. A new method of simulating radiation induced degradation in shallow trench isolation(STI) is presented. A comparison of radiation induced offstate leakage current in test n MOSFETs between total dose irradiation experiments and simulation results exhibits excellent agreement. The investigation results imply that the enhancement of the leakage current may be worse for the dose rate encountered in the environment of space.