Method of Vacuum Depositing Metallic and Nonmetallic Coating Onto a Substrate.

Abstract : Metallic and non metallic coatings are vacuum deposited onto a substrate using different deposition methods in a single vacuum deposition chamber without breaking vacuum between depositions. The deposition methods are RF sputter, electron beam gun evaporation, and chemical vapor deposition. The method allows for a multiple deposition of a large number of distinct and special coatings on various substrates to be accomplished without exposing the sensitive coatings to atmospheric poisoning. (Author)