An electromechanical component thereof and methods for preparing
1999
An electromechanical device consisting of a polymer body having a mechanically active part and a frame, and of a metal layer, the same the mechanically active part for mechanical stabilization at least partially covered. The electromechanical device may be an acceleration sensor, a yaw rate sensor, a microvalve, a micropump, a pressure sensor or a force sensor. The electromechanical component caused in its production as opposed to electromechanical components, which are produced by silicon technology, drastically reduced costs, as for the production rather than the intricate, silicon technology simple injection molding and / or stamping process can be used.
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