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Highly Selective AlSiCu Etching Using BBr_3 Mixed-Gas Plasma : Etching and Deposition Technology
Highly Selective AlSiCu Etching Using BBr_3 Mixed-Gas Plasma : Etching and Deposition Technology
1991
Masahiro Yoneda
Hisaharu Sawai
Nobuo Fujiwara
Kyusaku Nishioka
Haruhiko Abe
Keywords:
Dry etching
Reactive-ion etching
Plasma etching
Etching
Materials science
Analytical chemistry
Deposition (law)
mixed gas
highly selective
Chemical engineering
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